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专利名称：Apparatus and method for manufacturing
laminated substrate
发明人：Yoshimasa Miyajima,Ariyoshi Shibata,Joji
Hasegawa,Tetsuji Kadowaki
申请号：US10935240申请日：20040908
公开号：US20050199346A1公开日：20050915
专利附图：
摘要：An apparatus for manufacturing a laminated substrate with a simple structureand with satisfactory yield. First and second holding plates each attract substrates
without contacting a laminating surface of the two substrates. A substrate conveyingdevice conveys the substrates into the processing chamber. The substrate conveyingdevice attracts only the surface of a substrate that is opposite to the laminating surface,transfers the substrate to a holding plate, and receives the substrate from the holdingplate.
申请人：Yoshimasa Miyajima,Ariyoshi Shibata,Joji Hasegawa,Tetsuji Kadowaki
地址：Kasugai JP,Kasugai JP,Kasugai JP,Kasugai JP
国籍：JP,JP,JP,JP
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