专利内容由知识产权出版社提供
专利名称：Micro stage for particle beam column using
piezo elements as actuator
发明人：Ho Seob Kim,Byeng Jin Kim,Do Jin Seong申请号：US14657234申请日：20150313公开号：US09837245B2公开日：20171205
专利附图：
摘要：Disclosed herein is a micro stage using a piezoelectric element that can bereliably operated even in a vacuum environment. In a particle column requiring a highprecision, for example, a microelectronic column, the micro stage can be used as a stage
with micro or nano degree precision for alignment of parts of the column, or for moving asample, and so on.
申请人：Ho Seob Kim,Byeng Jin Kim,Do Jin Seong
地址：Incheon KR,Incheon KR,Seoul KR
国籍：KR,KR,KR
代理机构：Park Law Firm
代理人：John K. Park
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