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专利名称：Method of shaping lithographically-produced probe elements
发明人：Bahadir Tunaboylu,Edward L. Malantonio申请号：US11280090申请日：20051116公开号：US07462800B2公开日：20081209
专利附图：
摘要：A method is provided for shaping tips of lithographically-produced probeelements configured for use in a probe card to establish electrical communication with acontact of a semiconductor device to be tested. The method includes (a) lithographically
producing a plurality of probe elements and (b) using a subtractive process, such as laserablation or micro-electro-discharge machining, to remove material from each tip of theplurality of probe elements to form each tip into a shape well adapted to penetrate acontaminant oxide layer.
申请人：Bahadir Tunaboylu,Edward L. Malantonio
地址：Gilbert AZ US,Conshohocken PA US
国籍：US,US
代理机构：Hickman Palermo Truong & Becker LLP
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